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Lattice Parameters of Ion-Implanted Silicon Crystals
Lattice Parameters of Ion-Implanted Silicon Crystals
1971
Tomokuni Mitsuishi
Seigô Kishino
Atsuko Noda
Keywords:
Ion implantation
Annealing (metallurgy)
Lattice constant
Analytical chemistry
Boron
Wafer
Ion
Crystallography
Nuclear magnetic resonance
Crystal
Silicon
Physics
Charge-carrier density
Lattice (order)
Correction
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