Old Web
English
Sign In
Acemap
>
Paper
>
Inter-diffusion and amorphization during ion-irradiation in Mo/Si nano-multi-layer materials.
Inter-diffusion and amorphization during ion-irradiation in Mo/Si nano-multi-layer materials.
2001
S. Ohnuki
F. Arimoto
Seiichi Watanabe
P. R. Okamoto
N.Q. Lam
Hiroaki Abe
Keywords:
Ion implantation
Nano-
Irradiation
Molybdenum
Ion
Silicon
Inorganic chemistry
Materials science
Chemical engineering
multi layer
Correction
Source
Cite
Save
Machine Reading By IdeaReader
0
References
0
Citations
NaN
KQI
[]