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Fast Nanometer Positioning System by Combining Fast Resonant Mode and Accurate Piezostack Direct Drive
Fast Nanometer Positioning System by Combining Fast Resonant Mode and Accurate Piezostack Direct Drive
2013
Anindito Santoso
Jan Peirs
Farid Al-Bender
Dominiek Reynaerts
Keywords:
Nanometre
Positioning system
Control engineering
Electronic engineering
Materials science
Computer science
Correction
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