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Fabrication of planar optical waveguides by 6.0 MeV silicon ion implantation in Nd-doped phosphate glasses
Fabrication of planar optical waveguides by 6.0 MeV silicon ion implantation in Nd-doped phosphate glasses
2018
Xiao-Liang Shen
Han-Qing Dai
Liao-Lin Zhang
Yue Wang
Qi-Feng Zhu
Haitao Guo
Weinan Li
Chun-Xiao Liu
Keywords:
Waveguide (optics)
Ion implantation
Laser
Analytical chemistry
Physics
Doping
Phosphate
Silicon
Fabrication
Optoelectronics
Optics
Planar
Correction
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