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17aA01 Diffusion enhancement of oxygen and boron in Si by laser irradiation(NCCG-35)
17aA01 Diffusion enhancement of oxygen and boron in Si by laser irradiation(NCCG-35)
2005
kakimoto kouiti
Kakimoto Koichi
Liu Lijyun
ryuu ritu gun
Tanahashi Katsuto
tanahasi katuto
kaneda hirosi
Yamada-Kaneta Hiroshi
Keywords:
Oxygen
Radiochemistry
Boron
Irradiation
Laser
Materials science
Photochemistry
Correction
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