Magnification measuring device of the method and the optical path obtaining the position data of the measuring points

1995 
(57) Abstract: The present invention relates to an apparatus for measuring the magnification of the method and an optical path determining the position of the measuring point of the optical path. Laser beam through a plug entrance element (32a) is plug entering the optical path of the microscope. Spectrometer (4c) is an optical path end, separated again taken out the laser beam, directed to the position sensor (45a). Depending on the magnification of the optical path optical system (8, 13), the measuring light beam impinges on positions different Tsu. Thus, it is possible to easily derive the predetermined magnification. Magnification numbers, for performing a specific evaluated for observation region is important for the user. Further, describing the various development examples and details.
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