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Facile growth of aluminum oxide thin film by chemical liquid deposition and its application in devices
Facile growth of aluminum oxide thin film by chemical liquid deposition and its application in devices
2020
Dianlun Li
Lu Ruan
Jie Sun
Chaoxing Wu
Ziwen Yan
Jintang Lin
Qun Yan
Keywords:
Thin film
Deposition (law)
Materials science
Aluminum oxide
Chemical engineering
Correction
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