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Challenges and Solutions of Extremely Thin SOI (ETSOI) for CMOS Scaling to 22nm Node and Beyond
Challenges and Solutions of Extremely Thin SOI (ETSOI) for CMOS Scaling to 22nm Node and Beyond
2010
Kangguo Cheng
Ali Khakifirooz
Pranita Kulkarni
Lisa F. Edge
Alexander Reznicek
Thomas N. Adam
Hong He
Soon-Cheon Seo
Sivananda K. Kanakasabapathy
Stefan Schmitz
Steven J. Holmes
Richard Johnson
Yu Zhu
J. Demarest
Devendra K. Sadana
Huiming Bu
Bruce B. Doris
Ghavam G. Shahidi
Keywords:
Parallel computing
Silicon on insulator
CMOS
Electronic engineering
Scaling
Materials science
Electrical engineering
cmos scaling
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