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Precision of Micro Hall Effect Measurements in Scribe Line Test Pads of B-doped SiGe
Precision of Micro Hall Effect Measurements in Scribe Line Test Pads of B-doped SiGe
2017
Maria-Louise Witthøft
Frederik Westergaard Østerberg
Janusz Bogdanowicz
Andreas Schulze
Wilfried Vandervorst
Rong Lin
Henrik Hartmann Henrichsen
Peter Folmer Nielsen
Ole Hansen
Dirch Hjorth Petersen
Keywords:
Hall effect
Doping
Analytical chemistry
Materials science
Optoelectronics
Correction
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