Solar energy silicon chip diffusion equipment

The utility model discloses a solar energy silicon chip diffusion equipment belongs to the solar energy photovoltaic technique field, and it includes that quartz boat, air current collect the device, and the quartz boat constitutes bearing structure by two backup pads and the quartzy stick of a plurality of cavitys located between the backup pad, the quartz stick is gone up to open has a plurality of cuttings that are used for placing the silicon chip, is located still to have opened scattered gas pocket between adjacent cutting, and the gas pocket that just looses link up with quartzy stick, it has a plurality ofly and each quartzy excellent communicating through -hole to open in the backup pad, the air current collects the device and is a overhead paddle structure that has the hole of converging, converges the hole exit end towards the quartz boat, and the projection of through -hole all is located the exit end in the hole of converging in the backup pad. The utility model discloses a solar energy silicon chip diffusion equipment compiles the device through the air current and compiles the air current, makes the air current flow into fast in the quartzy stick on the quartz boat and blow out from the gas pocket that looses, and abundant with diffuse source and space that distribute uniformly between the silicon chip is regional, has improved silicon chip diffusion homogeneity, can also improve the utilization ratio of single furnace output and diffuse source simultaneously, reduction in production cost.