High-reflectivity HfO2/SiO2 ultraviolet mirrors

High-reflectivity dense multilayer coatings were produced for the ultraviolet spectral region. Thin-film single layers and UV mirrors were deposited by ion plating and plasma ion-assisted deposition high-energetic technologies. Optical characterizations of HfO 2 and SiO 2 single layers are made. The optical constants obtained for these two materials are presented. HfO 2 and SiO 2 mirrors with a reflectance of ∼99% near 250 nm are reported.