A model for coplanar waveguide transmission line structures on semiconductor substrates

An accurate model for coplanar waveguide transmission line structures on semiconductive substrates is presented. The model is useful for simulating long (> 0.5 mm) interconnects on LSI and VLSI GaAs circuits as well as high speed Si ICs. When simulated in the frequency domain, the model shows an excellent match to measured S parameters of coplanar waveguide samples. >