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Investigation of the electrical performance of hfo2 dielectrics deposited on passivated germanium substrates
Investigation of the electrical performance of hfo2 dielectrics deposited on passivated germanium substrates
2017
Qifeng Lu
Yifei Mu
Yinchao Zhao
C. Z. Zhao
Stephen Taylor
Paul R. Chalker
Keywords:
Germanium
Dielectric
Inorganic chemistry
Materials science
electrical performance
Optoelectronics
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