Fabrication and packaging of MEMS based platform for hydrogen sensor using ZnO---SnO2 composites

Thin films of metal-oxide with integrated microheater on micromachined silicon substrate have attracted great deal of interest towards the development of extremely small and highly sensitive gas sensor. Fabrication of MEMS microheater which is the key component for the development of low power gas sensor is reported here. The microheater is fabricated in a novel co planer fashion where the heating element and the inter-digitated electrode are place side by side. The fabricated device is structurally and electrically characterized by SEM and I---V measurements. Using ZnO---SnO2 composite material, hydrogen sensor was constructed on the microheater platform. A suitable package for encapsulating the fabricated device is designed and the device was successfully mounted on it. The sensing behavior of the packaged sensor is performed by exposing the sensor to hydrogen.