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Electron heating dynamics and plasma parameters control in capacitively coupled plasma
Electron heating dynamics and plasma parameters control in capacitively coupled plasma
2021
Wang Li
Wen De-Qi
Tian Chong-Biao
Song Yuan-Hong
Wang You-nian
Keywords:
Capacitively coupled plasma
electron heating
Plasma parameters
Materials science
Dynamics (mechanics)
Atomic physics
Correction
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