Old Web
English
Sign In
Acemap
>
Paper
>
A Method for Solving Arbitrary MEMS Perforation Problems with Edge and Rare Gas Effects
A Method for Solving Arbitrary MEMS Perforation Problems with Edge and Rare Gas Effects
2005
P. Raback
T. Veijola
Keywords:
Microelectromechanical systems
Computer science
Mechanical engineering
Materials science
rare gas
Correction
Source
Cite
Save
Machine Reading By IdeaReader
0
References
0
Citations
NaN
KQI
[]