Three-Dimensional Integrated Process Simulator: 3D-MIPS

We have developed a three-dimensional integrated process simulator of topography and impurity: 3D-MIPS. 3D-MIPS includes topography and impurity simulator, which can simulate deposition, etching, photolithography, BPSG flow, ion implantation, oxidation and impurity diffusion. The diffusion model, in particular, uses a novel equation which unifies diffusion and segregation. In this paper, these models and their simulation results are presented, and we demonstrate that it is possible to simulate 3D-complicated structures stably.