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Optimized Design and Fabrication Methods for Miniature Piezoresistive Pressure Sensors
Optimized Design and Fabrication Methods for Miniature Piezoresistive Pressure Sensors
1986
B. Kloeck
B. Stauffer
D. C. Scott
N.F. de Rooij
Keywords:
Piezoresistive effect
Pressure sensor
Electronic engineering
Materials science
fabrication methods
piezoresistive pressure sensors
Optoelectronics
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