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LINEAR VIBROMOTOR-ACTUATED MICROMACHINED MICROREFLECTOR FOR INTEGRATED OPTICAL SYSTEMS
LINEAR VIBROMOTOR-ACTUATED MICROMACHINED MICROREFLECTOR FOR INTEGRATED OPTICAL SYSTEMS
1999
M. Daneman
Norman C. Tien
Olav Solgaard
Kam Y. Lau
Richard S. Muller
Keywords:
Materials science
Optoelectronics
Computer science
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