Optical and Micro-structural Properties of the uniform large-area Carbon-based Films Prepared by Pulsed Laser Deposition

Abstract A setup of laser scan for the large-area film prepared by pulsed laser deposition was founded. Then the DLC and SiC films were deposited respectively on the silicon substrates with the diameter of 127 mm, and their thickness deviations were about 3.7% and 3.5%, respectively. At different positions of the large-area SiC film sample, there was a little of difference among the infrared transmittance spectra. However, there are obvious differences among the infrared transmittance spectra at different positions of the large-area DLC film sample, and infrared property of the large-are DLC film worsened seriously so that it could not be used for the infrared window. Raman spectroscopies showed that the large-area SiC film had the similar micro-structural property, but the large-area DLC film had different micro-structural properties dependent on the grown positions. It’s indicated that pulsed laser deposition could get the uniform large-area film by laser scan, but it’s uncertain to get the homogeneous film.