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Particle growth in highly magnetized Ar/C 2 H 2 capacitively-coupled radio-frequency discharge
Particle growth in highly magnetized Ar/C 2 H 2 capacitively-coupled radio-frequency discharge
2018
Lénaïc Couëdel
Edward Thomas
D Artis
Cédric Pardanaud
Min P. Khanal
Spencer LeBlanc
Stéphane Coussan
C. Arnas
Taylor Hall
Uwe Konopka
Minseo Park
Keywords:
Radio frequency
particle growth
Physics
Atomic physics
Correction
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