Photoelectric displacement sensor and preparation method thereof

2009 
The invention relates to a photoelectric displacement sensor and a preparation method thereof, belonging to the sensor technical field. The photoelectric displacement sensor comprises a laser, an optical fiber and a displacement scale plate, wherein the laser is arranged on a principal axis of an object to be measured and can move along the principle axial of the object to be measured; laser beams generated by the laser are irradiated to the displacement scale plate by the optical fiber; displacement scales on the displacement scale plate are made from semiconductor material with photoconductive effect; the displacement scale plate is used for responding the laser beams transmitted by the optical fiber and generates light currents. The photoelectric displacement sensor has simple complex structure, small volume, is convenient to carry and substantially increases the measuring accuracy compared with the traditional displacement sensor, simultaneously can be applied to the large-scale production technology of micro-electronics, and causes the production cost to reduce; compared with the cost of the abroad similar high-end product, the cost of the sensor is comparatively low.
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