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Influence of the electron irradiation parameters on the cross section of formation of intrinsic defects in silicon
Influence of the electron irradiation parameters on the cross section of formation of intrinsic defects in silicon
1991
V. V. Emtsev
P.M. Klinger
T.V. Mashovets
Keywords:
Thin film
Radiochemistry
Frenkel defect
Irradiation
Electron
Vacancy defect
Electron beam processing
Chemistry
Silicon
Mineralogy
Inorganic compound
Physical chemistry
Correction
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