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A study of the properties of low temperature chemically vapour deposited phosphosilicate glass films
A study of the properties of low temperature chemically vapour deposited phosphosilicate glass films
1988
C. Pavelescu
C. Cobianu
N. Vlahovici
C Ghita
Keywords:
Chemical vapor deposition
Phosphosilicate glass
Analytical chemistry
Thin film
Refractive index
Infrared
Inorganic chemistry
Specific gravity
Materials science
Kinetics
Correction
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