Old Web
English
Sign In
Acemap
>
Paper
>
Al-Doped Silicon-Based Thin Film Humidity Sensors Prepared via Metal Induced Method
Al-Doped Silicon-Based Thin Film Humidity Sensors Prepared via Metal Induced Method
2013
Meng-Chu Chen
Ting-Jen Hsueh
Keywords:
Thin film
Doping
Metal
Humidity
Analytical chemistry
Silicon
Chemistry
Inorganic chemistry
silicon based
Chemical engineering
Correction
Source
Cite
Save
Machine Reading By IdeaReader
19
References
0
Citations
NaN
KQI
[]