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High-Sensitivity CMOS-MEMS Inertial Sensor Technology and Its Application System
High-Sensitivity CMOS-MEMS Inertial Sensor Technology and Its Application System
2018
Hiroyuki Ito
Daisuke Yamane
Toshifumi Konishi
Shiro Dosho
Noboru Ishihara
Katsuyuki Machida
Masato Sone
Yoshihiro Miyake
Kazuya Masu
Keywords:
Inertial frame of reference
Microelectromechanical systems
Accelerometer
Electronic engineering
Materials science
CMOS
cmos mems
Electrical engineering
Computer science
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