SCaMsim, a new three-dimensional simulation tool for Scanning Capacitance Microscopy

Quantitative dopant profiling by Scanning Capacitance Microscopy (SCM) still requires a large effort in terms of modelling. While the analytical approach remains useful because of its simplicity, the numerical approach takes better account of the three-dimensional (3D) features and the complex non-linear response of the system. In this paper, we present the results and the performances of SCaMsim, a new 3D SCM simulation tool. SCaMsim is based on a finite elements (FE) device simulation software (DESSISISE) and allows calibration of constant-dV and constant-dC measurements via the calculation of theoretical C-V curves of different, realistic tip-sample geometries. Some of the results obtained with different tip models are presented and compared to other published data.