A method for producing a layer composite consisting of a plastic film and a deposited layer thereon

The invention relates to a method for producing a layer composite of plastic film and at least one directly on the plastic film by chemical vapor deposition within a vacuum chamber deposited layer having an at least 20 percent by weight of a metal element or a semiconductor element, wherein during the film deposition at least one monomer is introduced into the vacuum chamber and forming a plasma within the vacuum chamber. According to the invention the layer is applied after the film deposition at least in a surface region with accelerated electrons.