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Paramagnetic point defects in silicon nitride films annealed at 1050
Paramagnetic point defects in silicon nitride films annealed at 1050
2018
Shinji Yamaguchi
Osamu Kazumi
Kiyoteru Kobayashi
Keywords:
Nuclear magnetic resonance
Silicon nitride
Crystallographic defect
Annealing (metallurgy)
Paramagnetism
Materials science
Optoelectronics
Correction
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