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Ferroelectric Phase Content in 7 nm Hf (1‐x) Zr x O 2 Thin Films Determined by X‐ray based Methods
Ferroelectric Phase Content in 7 nm Hf (1‐x) Zr x O 2 Thin Films Determined by X‐ray based Methods
2021
Vineetha Mukundan
Steven Consiglio
Dina H. Triyoso
Kandabara Tapily
Martin E. McBriarty
S B Schujman
Karsten Beckmann
Jubin Hazra
Vidya S. Kaushik
Nathaniel C. Cady
Robert D. Clark
Gert J. Leusink
Alain C. Diebold
Keywords:
content
Phase (matter)
Ferroelectricity
Analytical chemistry
Thin film
X-ray
Materials science
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