A processing method of a focal plane array of indium bumps highly statistical data

The present invention discloses a method for processing statistical focal plane array of indium columns height data. Data processing of the present invention the focal plane of the surface topography data acquired by a laser scanning confocal microscope in accordance with the shape characteristics of the focal plane arrays of indium columns, the entire device finally obtained height indium column values ​​and statistical distribution. The present invention comprises: 1, obtaining surface topography data matrix focal plane arrays, and generate the corresponding coordinate matrix; 2, substantially determined by calculation height indium column height statistical analysis; 3, using a substantially single degree of separation height indium column of the data matrix ; 4, calculate the height of the individual indium columns; 5, all statistical height indium column. Advantage of the present invention are: 1, with the present invention may be implemented indium bumps highly automated statistics, provide the basis for down bonding device interconnection process focal plane; 2, the present invention provides a data processing method, the objective and accurate statistics, negative artificial selected data points imperfections.