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CO2‐Based Dual‐Tone Resists for Electron Beam Lithography
CO2‐Based Dual‐Tone Resists for Electron Beam Lithography
2020
Lu Xinyu
Hao Luo
Kai Wang
Yao-yao Zhang
Xiao‐Feng Zhu
Dongxue Li
Bingze Ma
Shisheng Xiong
Paul F. Nealey
Qiang Li
Guang-Peng Wu
Keywords:
Photoresist
Nanolithography
Resist
Optoelectronics
sustainable materials
Materials science
Electron-beam lithography
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