Old Web
English
Sign In
Acemap
>
Paper
>
Investigations on the positioning accuracy of the Nano Fabrication Machine (NFM-100)
Investigations on the positioning accuracy of the Nano Fabrication Machine (NFM-100)
2021
Jaqueline Stauffenberg
Ingo Ortlepp
Ulrike Blumröder
Denis Dontsov
Christoph Schäffel
Mathias Holz
Ivo W. Rangelow
Eberhard Manske
Keywords:
nano fabrication
Materials science
Nanotechnology
Correction
Source
Cite
Save
Machine Reading By IdeaReader
17
References
1
Citations
NaN
KQI
[]