Trend on the Recycling Technologies for the waste stripper solution by the Patent Analysis

The annual requirement of domestic waste photoresist stripper solution is about 1 trillion won level (50,000 tons) depends entirely on imports for its supplies. Nevertheless, there waste strippers which contain the impurities have been recycled or incinerated to a low level of recycle. These days the recycling technologies of the waste stripper solution has been widely studied from the view points of economy and efficiency. In this paper, the recycling technologies on patent of the waste stripper solution were analyzed. The range of search was limited within the open patents of USA (US), European Union (EP), Japan (JP), and Korea (KR) up to september, 2007. Patents have been collected using key-words searching and filtered by filtering criteria. The trends of the patents was analyzed by the years, countries, companies, and technologies.