Simultaneous Charged Particle Activation Analysis of Carbon and Boron in Gallium Arsenide

Tadashi Nozaki,Y. Itoh,Yoshitaka Ohkubo,Toshimasa Kimura,Hiroto Fukushima

Simultaneous Charged Particle Activation Analysis of Carbon and Boron in Gallium Arsenide

1985

Tadashi Nozaki
Y. Itoh
Yoshitaka Ohkubo
Toshimasa Kimura
Hiroto Fukushima

A simple method has been developed for simultaneous determination of carbon and boron in GaAs by deuteron activation analysis. The detection limit is 2×1014 atomscm-3 for both elements. The determined carbon concentrations are compared with the results of IR spectrophotometry.

Keywords:

Detection limit
Radiochemistry
Boron
Gallium arsenide
Impurity
Deuterium
Spectrophotometry
Analytical chemistry
Carbon
Chemistry
Charged particle
Inorganic compound
Inorganic chemistry

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