Incident angle dependence of O/sub 2/ cluster ions on Ta/sub 2/O/sub 5/ thin film properties

S. Inoue,Y. Fujiwara,N. Toyoda,Isao Yamada,H. Tsubakino

Incident angle dependence of O/sub 2/ cluster ions on Ta/sub 2/O/sub 5/ thin film properties

2003

S. Inoue
Y. Fujiwara
N. Toyoda
Isao Yamada
H. Tsubakino

In this paper, the incident angle dependence of assisting O/sub 2/ cluster ion beams for various film properties was reported. Surface roughness and AFM image of Ta/sub 2/O/sub 5/ films was shown.

Keywords:

Materials science
Surface roughness
Thin film
Optics
Atomic force microscopy
Ion
Angle of incidence
dielectric thin films
Beam (structure)

Correction
Source
Cite
Save
Machine Reading By IdeaReader

References

Citations