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Ultra-Thin SOI/BOX Layers and Next Generations Planar Fully Depleted Substrates
Ultra-Thin SOI/BOX Layers and Next Generations Planar Fully Depleted Substrates
2012
Walter Schwarzenbach
V. Barec
X. Cauchy
N. Daval
Sebastien Kerdiles
F. Boedt
Olivier Bonnin
Bich-Yen Nguyen
Christophe Maleville
Keywords:
Silicon on insulator
Electronic engineering
Planar
Materials science
Optoelectronics
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