GISAXS and AFM study of self‐assembled Fe2O3 nanoparticles and Si nanodots

The self-assembled iron oxide nanoparticles synthesized by a high-temperature solution phase reaction and the silicon dots produced by an ion bombardment have been investigated by using atomic force microscopy (AFM) and grazing-incidence small-angle scattering (GISAXS) technique. Both methods delivered the consistent results on the estimate for the particle size and shape and primary knowledge on the ordering of the objects. A distorted-wave Born approximation approach has been used for X-ray data fitting. In the case of the silicon dots, the dense long-range particle distribution over the whole sample surface is found, where as FeO nanoparticles exhibit the short-range correlations. Both results are consistent with the local AFM investigations.