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【Highlighted Presentation】Evaluation of Gettering Efficiency in Silicon Wafer by Pulse Photoconductivity Method
【Highlighted Presentation】Evaluation of Gettering Efficiency in Silicon Wafer by Pulse Photoconductivity Method
2018
Takahiro Maeta
Susumu Maeda
Moriya Miyashita
Masao Yoshioka
Shotaro Kuzukawa
Hiroki Matsuyama
Kazuhiro Kobayashi
Takeshi Hashishin
Hiroshi Kubota
Keywords:
Optoelectronics
Pulse (signal processing)
Getter
Wafer
Photoconductivity
Materials science
Silicon oxide
Correction
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