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The micromechanical sensor, the sensor array and method
The micromechanical sensor, the sensor array and method
2005
Heikki Seppae
Kirsi Tappura
Jussi Tuppurainen
Tomi Mattila
Ari Alastalo
Hannu Helle
Aarne Oja
Keywords:
Electro-optical sensor
Sensor array
Materials science
Electronic engineering
Acoustics
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