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Innovative SOI based MEMS using large deformation ultra-thin membranes: From micropumps to piezo-NEMS
Innovative SOI based MEMS using large deformation ultra-thin membranes: From micropumps to piezo-NEMS
2013
L Montes
R Lefevre
A Salette
D Rabaud
L Dargent
H Marko
X. Xu
Alexis Potié
B Bercu
R. Hinchet
F Rochette
G. Ardila
P Morfouli
M Mouis
Keywords:
Nanoelectromechanical systems
Deformation (mechanics)
Silicon on insulator
Membrane
Microelectromechanical systems
Materials science
Electronic engineering
large deformation
Optoelectronics
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