A method for interpreting V-I probe in a capacitively coupled plasma discharge

V-I probe measurement is usually used for a method of fault detection of plasma discharges. In this report, a method for monitoring plasma parameter using V-I probe is proposed. Data from the V-I probe were analyzed to estimate the plasma parameters, and these analyses were compared those measured from the Langmuir probe in a capacitively coupled plasma discharge. Using this method, the phase information from the V-I probe could be used to estimate the plasma density.