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Phase control in reactive magnetron deposited TaN and TaON thin films
Phase control in reactive magnetron deposited TaN and TaON thin films
2017
Nikola Radić
Marko Jerčinović
Maja Buljan
Krešimir Salamon
Ivančica Bogdanović-Radović
Mira Ristić
J. Sancho-Paramon
Sigrid Bernstorff
Keywords:
Thin film
Nitride
Nanocrystal
Deposition (phase transition)
Nanomaterials
Materials science
reactive magnetron
Chemical engineering
Electrical resistivity and conductivity
Nanostructure
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