Stress-induced performance enhancement in Si ultra-thin body FD-SOI MOSFETs: Impacts of scaling
2011
A detailed study of the impact of channel stress on (100)/<110> Ultra-Thin Body and BOX (UT2B) Fully Depleted SOI (FD-SOI) MOSFET performance is presented. Stress-induced mobility enhancement diminishes with Si body thickness scaling below 5nm for electrons but not for holes. Performance enhancement is maintained with gate-length scaling.
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