The aggregate of carbon nanotubes and a method of manufacturing the same

Forming a metal fine particle having a desired particle diameter on the substrate, a step of reducing the surface by heating the metal fine particles at a predetermined temperature of 300 ° C. to 400 ° C. in a reducing atmosphere, the reactor the metal fine particles and heating to a predetermined reaction temperature in the inner, after starting the heating of the metal fine particles, in the period before the start of growth of carbon nanotubes, the time the temperature of the metal fine particles is more than 450 ° C. is within 600 seconds and method for producing a carbon nanotube aggregate to the reactor by introducing the organic compound vapor and a step of growing carbon nanotubes on the metallic fine particles such that.