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Piezoelectricity of zinc oxide thin films deposited by plasma enhanced atomic layer deposition
Piezoelectricity of zinc oxide thin films deposited by plasma enhanced atomic layer deposition
2020
Taher Abu Ali
Julian Pilz
Philipp Schäffner
Barbara Stadlober
Anna Maria Coclite
Keywords:
Atomic layer deposition
zinc oxide thin films
Piezoelectricity
Materials science
Plasma
Chemical engineering
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