Energy Filtered X-Ray Photoemission Electron Microscopy

Abstract This chapter reviews photoemission electron microscopy (PEEM) and energy filtered X-ray PEEM (EXPEEM) that provides us the chemical mapping of the surface. We describe the history and the principle of PEEM and EXPEEM. We focus on the Wien filter type energy analyzer with the third order aberration corrected. In situ observation of surface reactions and chemical mapping of soft materials are discussed as examples of the PEEM and EXPEEM applications to chemistry.