Nanorobotic Manipulation inside Scanning Electron Microscope for the Electrical and Mechanical Characterization of ZnO nanowires

Revealing novel material behavior at the nanoscale is hindered by the difficulties of conducting well-instrumented tests. Hence, the nanorobotic manipulation inside scanning electron microscope system is considered as an efficient method in nano-measurements. We investigate the electrical and mechanical properties of Zinc oxide (ZnO) nanowires by direct manipulation with the aid of a scanning electron microscope (SEM) compatible nanomanipulator system and atomic force microscope (AFM). We report the contact resistance of ZnO nanowire-Au/tungsten/ZnO nanowire junctions, real-time impedance analysis, the nanoindentation hardness and elastic modulus of ZnO nanowires. This research will provide a better understanding of the electrical and mechanical behavior of a single ZnO nanowire for future applications in nanoscale field effect-transistors and nanosensors.