Calibration Method for Parallel Mechanism using Micro Grid Pattern

This paper investigates a calibration of a parallel mechanism stage which is set up under the microscope. The calibration method uses the measurement data of the translation movement in the plane of the end-effector and rotation about the axis perpendicular to it using measurement method with the micro grid pattern. This paper discusses its calibration method with experiments for the stage constructed a fixed linear actuated parallel mechanism. The results show that the calibration using limited data is possible and has good performance