STUDY OF AlGaAs/GaAs WAVEGUIDE STRUCTURE BY X-RAY DOUBLE CRYSTAL DIFFRACTION

An AlGaAs/GaAs waveguide structure sample was investigated by X-ray double crystal diffraction technique. Based on the X-ray dynamical diffraction theory the reflection intensities of the substrate and the films were calculated. Comparing the calculated results with the experimental ones, the real structure of the sample was obtained. The factors affecting the double crystal diffraction recking curves are discussed.